Submitted by wwwme on Mon, 05/10/2020 - 09:06 Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems Atik, A.C., Özkan, M.D., Özgür, E., Külah, H., Yildirim, E. Journal of Micromechanics and Microengineering July 2020